|○ Ultra-high speed measurement of 3200 scan/sec|
|○ Suitable for high-speed lines or in applications subject to vibration|
|○ Provides ultra-high accuracy of ± 0.3 μm over the entire measuring range (5 μm to 2 mm)|
|Order No (Laser Only)||544-534|
|Measuring Range||(0.05 to 10) mm / (0.002 to 0.4)”|
|Resolution (selectable)||(0.01 to 10) µm / (0.000001 to 0.0005)”|
|Repeatability*||± 0.04 µm / 0.0000016″|
|Accuracy (20°C)**||Whole ± 0.5 µm / Small ± (0.3 + 0.1 ΔD) µm***|
|Positional Error****||± 0.5 µm / 0.00002″|
|Measuring Area*****||(2 x 10) mm / (0.08 x 0.4)”|
|Scanning Rate||3200 scans/s|
|Laser Wavelength||650 nm|
|Laser Scanning Speed||(113 m/s) / (4449″/ s)|
|Temperature||(0 to 40)°C|
|Humidity||35% RH to 85% RH No condensation|
|Altitude||2000 m or less|
* Determined by the value of ± 2σ (σ: standard deviation) when measuring ø10 mm at the interval of 0.32 sec. (average 1024 times).
**Center of measuring range for cylindrical workpieces outside diameter.
*** ∆D=Difference in diameter between the master gauge and workpiece (Unit: mm).
**** An error of the outside diameter due to variation in the workpiece position either in the optical axis direction or in the scanning direction.
***** The area given by [optical axis direction]×[scanning direction]
Calibration and Repair Services
MRM provides Calibration and Repair Services for the
LSM-501S Mitutoyo Laser Scan Micrometer
For a quote, please email us at Service@MRMmetrology.com